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| 25 May 2023 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 2,313 | $148.00 | $342,324 25 May 2023 | 4,510 | ↗ |
| 15 May 2023 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 6,505 | $130.84 | $851,114 15 May 2023 | 29,005 | ↗ |
| 11 May 2023 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 10,546 | $125.06 | $1,318,883 11 May 2023 | 36,277 | ↗ |
| 15 Nov 2022 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 6,500 | $79.26 | $515,190 15 Nov 2022 | 48,286 | ↗ |
| 15 Aug 2022 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 9,461 | $75.35 | $712,886 15 Aug 2022 | 54,786 | ↗ |
| 28 Feb 2022 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 8,636 | $70.89 | $612,206 28 Feb 2022 | 58,125 | ↗ |
| 26 Aug 2021 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 18,065 | $49.72 | $898,192 26 Aug 2021 | 68,986 | ↗ |
| 26 May 2020 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 20,000 | $26.27 | $525,400 26 May 2020 | 84,009 | ↗ |
| 11 Feb 2020 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Option | 38,673 | $10.28 | $397,558 11 Feb 2020 | 111,103 | ↗ |
| 9 Dec 2019 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 24,389 | $22.56 | $550,216 9 Dec 2019 | 86,493 | ↗ |
| 13 Nov 2017 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 44,640 | $33.93 | $1,514,635 13 Nov 2017 | 56,184 | ↗ |
| 12 Sep 2017 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Option | 62,348 | $6.72 | $418,979 12 Sep 2017 | 94,032 | ↗ |
| 22 Aug 2017 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Option | 17,339 | $7.20 | $124,841 22 Aug 2017 | 86,523 | ↗ |
| 25 May 2017 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Option | 93,750 | $7.34 | $688,125 25 May 2017 | 125,434 | ↗ |
| 13 Feb 2017 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Option | 18,876 | $3.72 | $70,219 13 Feb 2017 | 80,512 | ↗ |
| 6 Feb 2017 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Option | 49,874 | $4.30 | $214,458 6 Feb 2017 | 61,782 | ↗ |
| 6 May 2016 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Buy | 5,000 | $2.45 | $12,250 6 May 2016 | 86,546 | ↗ |
| 6 May 2016 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Buy | 5,000 | $2.45 | $12,250 6 May 2016 | 86,546 | ↗ |
| 10 Aug 2015 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Option | 53,993 | $0.70 | $37,795 10 Aug 2015 | 135,539 | ↗ |
| 19 Feb 2015 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Option | 71,007 | $0.70 | $49,705 19 Feb 2015 | 152,553 | ↗ |
| 12 Feb 2013 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 8,500 | $1.30 | $11,050 12 Feb 2013 | 81,547 | ↗ |
| 9 Dec 2010 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 9,559 | $3.00 | $28,677 9 Dec 2010 | 94,308 | ↗ |
| 2 Dec 2010 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 12,383 | $2.61 | $32,320 2 Dec 2010 | 103,867 | ↗ |
| 22 Nov 2010 | ACLSAxcelis Technologies Inc | Kevin J Brewer EVP and Chief Financial Officer | Sale | 1,100 | $2.68 | $2,948 22 Nov 2010 | 116,250 | ↗ |